Abstract
R3-POWERUP will push through the new generation of 300mm Pilot Line Facility for Smart Power technology in Europe. This will enable the European industry to set the world reference of innovative and competitive solutions for critical societal challenges, like Energy saving and CO2 Reduction (ref. to COP21 Agreement ), as well as Sustainable Environment through electric mobility and industrial power efficiency. ● Development and demonstration of a brand new 300mm advanced manufacturing facility addressing a multi-KET Pilot. Line (i.e. Nanoelectronics, Nanotechnology, Advanced Manufacturing) ● Improvement in productivity and competitiveness of integrated IC solutions for smart power and power discrete technologies. The strategy of the project is the following: ● The Pilot Line will enable the realization of sub-100nm Smart Power processes, starting from the 90nm BCD10 process, taking profit from the advanced and peculiar equipments available only for 300mm wafer size. ● The availability of a 300mm full processing line will also exploit the portability to 300mm of the most critical and expensive process steps devoted to power discrete devices. ● The Pilot Line will build on Digital Factory and Industry 4.0 principles, enforcing a flexible, adaptive and reliable facility, in order to investigate also the synergy and economic feasibility of supporting both Smart Power and power discrete processes in the same manufacturing line. ● The application of such technologies will be a breakthrough enabler for Energy Efficiency and CO2 Reduction worldwide, in line with COP21’s global action plan. The Pilot Line is based on three main pillars: 1. Market driven continuous innovation on smart-power and power discrete; 2. Industrial policy focused on high quality and mass production’s cost optimization; 3. Set the ground for future wafer upgrade of “More than Moore” disruptive technologies (e.g. advanced MEMS manufacturing, now at 200mm)
Project details
Unibo Team Leader: Claudio Fiegna
Unibo involved Department/s:
Centro di Ricerca sui Sistemi Elettronici per l'Ingegneria dell'Informazione e delle Telecomunicazioni "Ercole De Castro" - ARCES (Advanced Research Center on Electronic System)
Coordinator:
STMicroelectronics S.r.l.(Italy)
Other Participants:
Slovenská technická univerzita v Bratislave - Slovak University of Technology in Bratislava
(Slovak Republic)
Università degli Studi di PAVIA
(Italy)
Advanced Packaging Center Bv
(Netherlands)
Applied Materials France
(France)
Green Power Technologies, S.L.
(Spain)
Universidad De Sevilla
(Spain)
Besi Austria GmbH
(Austria)
Vysoke Uceni Technicke V Brne-Technical University Of Brno
(Czech Republic)
S.O.I.Tec Silicon On Insulator Technologies Sa
(France)
Atotech Deutschland Gmbh
(Germany)
Applied Materials Ireland Limited
(Ireland)
Università di PISA
(Italy)
Consorzio Nazionale Interuniversitario Per La Nanoelettronica
(Italy)
Politecnico di TORINO
(Italy)
Applied Materials Israel Ltd
(Israel)
Robert Bosch Gmbh
(Germany)
ancosys GmbH
(Germany)
Siltronic Ag
(Germany)
KLA-Tencor MIE GmbH
(Germany)
Universitatea Politehnica Din Bucuresti
(Romania)
Ev Group E. Thallner Gmbh
(Austria)
Institut Mikroelektronickych Aplikaci S.R.O.
(Czech Republic)
Lam Research Sas
(France)
Nova Measuring Instruments Ltd
(Israel)
Consiglio Nazionale Delle Ricerche
(Italy)
Instytut Technologii Elektronowej
(Poland)
NanoDesign ltd.
(Slovak Republic)
Icos Vision Systems Nv
(Belgium)
AP&S International GmbH
(Germany)
DISCO HI-TEC EUROPE GmbH
(Germany)
Automatix Sp. z o. o.
(Poland)
Asm Europe Bv
(Netherlands)
Picosun Oy
(Finland)
Laser Systems & Solutions Of Europe
(France)
Third parties:
ALMA MATER STUDIORUM - Università di Bologna
(Italy)
Total Eu Contribution: Euro (EUR) 28.046.206,50
Project Duration in months: 42
Start Date:
01/11/2017
End Date:
30/04/2021
This project contributes to the achievement of the Sustainable Development Goals of the UN 2030 Agenda.
This project has received funding from the European Union’s Horizon 2020 research and innovation programme under grant agreement No 737417