R2POWER300

Preparing R2 extension to 300mm for BCD Smart Power and Power Discrete

Abstract

R2POWER300 is committed to challenge the following Objectives: Development and manufacturing of a multi-KET Pilot Line (1.e. Nanoelectronics, Nancotechnology, Advanced Manufacturing); Energy Efficiency and CO2 Reduction megatrends. The project aims to achieve the following Goals:1. Set the stage for the future extension to 300mm of the R2 Fab facility located in Agrate Brianza (Italy) - i.e. ine's specification, tools' evaluation and screening, new process' optimization and characterizzation, etc. 2.To evaluate, characterize and optimize the equipments and process necessary to achieve the new BCD10 technology, featuring 90nm lithography, at 300mm wafer siza. BDC (i.e. Bipolar+CMOS+DMOS) is a unique smart power technology invented by ST in the mid '80 (CMOS's gate lenght was 4#m at that time!). As of today BCD is one of the key technology assets of ST and the indefatigable evolution and challenging roadmap makes ST a world-class leader on smart power ICs. 3.Advanced System in Packages: some SiP activity will be performed, with specific reference to Sintering based dieattach. thermal analysis and dedicated packaging solution for high density ALD capacitors.

Project details

Unibo Team Leader: Claudio Fiegna

Unibo involved Department/s:
Centro di Ricerca sui Sistemi Elettronici per l'Ingegneria dell'Informazione e delle Telecomunicazioni "Ercole De Castro" - ARCES (Advanced Research Center on Electronic System)

Coordinator:
STMicroelectronics S.r.l.(Italy)

Other Participants:
Besi Netherlands BV (Netherlands)
Consiglio Nazionale Delle Ricerche (Italy)
NanoDesign ltd. (Slovak Republic)
Picosun Oy (Finland)
Università  di PISA (Italy)
Asm Europe Bv (Netherlands)
Consorzio Nazionale Interuniversitario Per La Nanoelettronica (Italy)
Politecnico di TORINO (Italy)
L.P.E Spa (Italy)

Third parties:
ALMA MATER STUDIORUM - Università di Bologna (Italy)

Total Eu Contribution: Euro (EUR) 2.060.272,44
Project Duration in months: 36
Start Date: 01/07/2015
End Date: 30/06/2018

Cordis webpage
Project website

UE flag This project has received funding from the European Union's Horizon 2020 research and innovation programme under grant agreement No 653933