41859 - Solid State Sensors (Graduate Course)

Learning outcomes

The learning outcome of this course is that of illustrating the functioning principles of the most important categories of solid-state sensors. The students will learn about sensors realized with  process techniques used in Microelectronics and Micro-Electro-Mechanics Systems (MEMS). For each sensor, the  physical effect, the model used for its characterization and the technological aspects used for the overall realization will be analyzed. During the lab practice, a number of tools suitable for the numerical simulation of the sensors proposed in the course will be shown.

Course contents

1. Course introduction. Definition and classification of sensors (the sensor cube by Middelhoek and Noorlag).
2. Main physical effects in solid-state sensors (photoelectric, piezoelectric, piezoresistive, thermoelectric, thermoresistive, Hall effect).
3. Brief description on the absorption of radiation in a semiconductor material. Elementary optical sensors: photoresistor, photodiode (in dc and pulsed regime), MOS photocapacitor, MOS and bipolar phototransistors. Structure and operation of charge-coupled devices (CCD); linear-array and full-frame image sensors. Performance analysis of solid-state video cameras.
4. Introduction to the elasticity theory; determination of the mechanical deformation of cantilever beams and membranes. Piezoresistive sensors of acceleration and pressure. Piezoelectric accelerometer. Vertical and lateral capacitive accelerometers.
5. Thermal sensors: integrated thermopile sensors; semiconductor-junction temperature sensors; proportional-to-absolute-temperature sensors (PTAT).
   
6. Magnetic sensors: Hall plates; differential-amplification magnetic sensors (DAMS); MAGFET and dual-drain MAGFET; vertical and lateral magnetotransistors.
   

Readings/Bibliography

Slides and lecture notes.

S. M. Sze “Semiconductor Sensors”, Wiley Interscience.

Some recent publications will be cited in the slides.

Readings on the concepts of  Microelectronics and Solid-State Electronics:

E. De Castro “Fondamenti di Elettronica”, UTET

M. Rudan "Tavole di Microelettronica", Pitagora Editrice Bologna

Teaching methods

The realization aspects of solid-state sensors will be addressed in the lectures. The course lectures will be followed by the lab practice. The practice work will be organized to be individual or for 2-4 people (depending on the availability of workstations in the lab). Aim of the practice work is that of giving to each student the possibility to investigate the operating regime of a number of sensors by using numerical tools for device simulation. The practice will be programmed so that in each activity the students will simulate the functioning conditions previously described in a theoretical analysis during the lectures.

Assessment methods

The assessment is based on a single individual oral examination.

Teaching tools

Video projector and PC for the lectures, Lab1 educational laboratory for the lab practice.

Office hours

See the website of Susanna Reggiani